Vacuum Coating
MBRAUN designs coating systems for a variety of thin film applications with a broad range of options and customized solutions. Coating systems at MBRAUN incorporate all main evaporation technologies including resistive thermal evaporation, temperature controlled evaporation (ex. Organic material), electron beam evaporation w/ multiple pocket arrangements, RF, DC or Pulsed DC Magnetron Sputtering and also reactive RF magnetron sputtering w/ reactive gases.
PROvap
- Glovebox integrated system
- Compact and cost-effective solution
- Easy configuration design
- Co-deposition
- Uniformity up to +/-3 % (with specific geometry design up to +/1 %)
- Two standard-sizes: PROvap 4G and PROvap 5G
- Up to 8 deposition sources possible
- Substrate size up to 100x100 mm or diam. 100 mm (4”) for PROvap 4G
- Substrate size up to 150x150 mm or diam. 150 mm (6”) for PROvap 5G
UNIvap
- Standalone system
- Compact and cost-effective solution
- Easy configuration design
- Co-deposition is possible
- Uniformity up to +/-3 % (with specific geometry design up to +/1 %)
- Two standard-sizes: UNIvap 4S and UNIvap 5S
- Up to 8 deposition sources possible
- Substrate size up to 100x100 mm or diam. 100 mm (4”) for UNIvap 4S
- Substrate size up to 150x150 mm or diam. 150 mm (6”) for UNIvap 5S
OPTIvap
- Flexible, modular system
- Stand-alone (S) or glovebox integrated (G)
- Building block for cluster tool
- Multi-substrate & multi-mask processes
- Standard uniformity: +/- 3 % (with specific geometry design up to +/1 %)
- Substrate size up to 150x150 mm or diam. 150 mm (6“) for OPTIvap 4
- Substrate size up to 200x200 mm or diam. 280 mm (8“) for OPTIvap 6
Applications:
- Complex multilayer devices (OLED,OPV)
- Optical layers
- Semiconductor, PV
PEROvap
Specially designed for Perovskites
- Ideal tool for efficient R&D
- Special system design
- Special precursor source
- High stability at low temperature
- Stable and defined deposition process
- High vacuum conditions
- Low cross-talk
- High repeatability
- Material compatibility for a very long lifetime
- Patent pending
